Publications

Development of a Tungsten Plasma Etch Process for IR Nanobolometer Fabrication

Publication Details

Title
Development of a Tungsten Plasma Etch Process for IR Nanobolometer Fabrication
Author(s)
Gilmartin, S. F., K. I. Arshak, D. Bain, W. A. Lane, B. McCarthy, D. Collins, S. B. Newcomb and A. Arshak
Institute
MSSI
Publication Type
Journal
Publication Source
Microelectronic Engineering
(Vol 87 (5-8), pp. 1634-1639. ISSN: 0167-9317)
Publication Date
2010
Topic
General
Abstract
n/a