The Auriga FIB is a state of the art, one-stop shop for nanotechnology. It features an ion column and field emission scanning electron microscope [SEM], built into the same vacuum system. Sub 50 nm feature sizes can be FIB patterned by selective ion sputtering, and imaged in real time by the SEM.

Specifications:
The FIB is employed for nano-patterning of substrates, or 3-D nano-sculpting. It is used for roughening of surfaces, sample cross-sectioning, and transmission electron microscope [TEM] specimen preparation. Both the ion and electron beams can be controlled by a Raith lithography program, for more sophisticated lithography. The microscope features localised controlled deposition of metals such as Platinum [Pt] and Tungsten [W], or insulators such as silicon dioxide [SiO2]. A micromanipulator is situated in the chamber for manipulation of meso and nano-scaled objects – for example the in situ manipulation of TEM samples.

Industry:  
FIB is a versatile tool for device cross sectioning and failure analysis, rapid device proto-typing, nano-patterning, and sample trouble shooting. At CRANN, FIB is deployed across a wide spectrum of industrial sectors, with clients ranging from indigenous SMEs to global multi-nationals. Typical industry sectors leveraging FIB capability at CRANN include:

• Integrated Circuit manufacturers
• MEMS device companies
• Photonics
• Healthcare and Wellbeing

Case Study:
Researchers at CRANN are utilising the fine patterning and polishing capability of the new FIB to fabricate high resolution transmission electron microscopy [HRTEM] samples. Previously this work was outsourced to foreign collaborators. Using the new technological capability, CRANN researchers in the group of Prof. JMD Coey, working in association with Intel, are gaining quicker understanding into the structure of complex magnetic multi-layers, suitable for deployment in next generation, ultra high density data storage devices. 

Fig. 1: HRTEM image of a magnetic tunnel junction [MTJ], economically important for future high density data storage applications. The white region is highly crystalline MgO. The sample was prepared for advanced microscopy on the Auriga FIB. [Note: Scale bar is 1 nm]

For further information on the Auriga FIB at CRANN as well as details on how to access this instrument, please use the following link.