Overview

A Hitachi SU-70 field-emission SEM is scheduled to be commissioned at MSSI in March 2009.  A limitation to existing SEMs is that, whereas high-resolution imaging requires high-voltage operation, sensitive analytical SEM dictates high-current operation.  Fitted with a Schottky emission electron source, the SU-70 can generate probe currents up to 100nA for energy-dispersive x-ray analysis (EDX) but can achieve ultra-high resolution of 1 nm operating at 15 kV.  Fitted with a 110mm X 110mm, Eucentric 5 –axis motorized stage, samples up to 50x50x40 mm can be accommodated.

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Location:

MSSI, UL