Overview
The Titan 80-300 TEM offers sub-Ångstrom resolution (<0.1 nm), enabling imaging with atomic resolution in both normal imaging mode and scanning TEM (STEM) mode. This extraordinary performance level, combined with automated experiments to assist operators during analysis, enables analytical and structural characterization of specimens at an atomic scale. Analytical capabilities include Energy Dispersive X-ray Spectroscopy (EDX) as well as Electron Energy Loss Spectroscopy (EELS). While EDX is suitable for precise compositional analysis, EELS delivers information on the electronic band structure of materials. This combined analysis approach provides INSPIRE with an incredibly powerful tool to understand processing of nano-structured systems.
Main Features:
• HRTEM (incl. exit wave reconstruction)
• Atomic Resolution
• HRSTEM (Z-contrast imaging)
• Electron Diffraction
• Convergent Beam Electron Diffraction
• Dark field imaging of lattice defects
• Electron Spectroscopic imaging
• Electron Energy Loss Spectroscopy
• Energy Dispersive X-Ray Spectroscopy
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Location:
CRANN, TCD
Case Study
TEM analysis was used to study chemical composition of an IC device. Analysis were carried out in STEM mode. The beam is scanned while collecting simultaneous EELS and EDS signals. The resulting elemental maps reveal the entire chemistry of the device under investigation and are useful for failure analysis. Generally EELS provides strong signals for the light elements, while EDS analysis works better for detecting heavier elements. The usage of both techniques is suitable for the whole range of elements
High resolution images (Fig. 3,4 in Image Gallery) of multilayered oxide structures are used to study atomic configuration of internal interfaces. These interfaces can be between two phases (Fig. 3) or between different crystalographic orientations (Fig. 4). Due to the Z contrast imaging conditions in the STEM experiment the diffrent layers can be identified. A series of images is used to restore the exit plane wave (Fig 4). The phase of this wave enables a direct vizualisation of the atom positions within the specimen.