Overview

The CRANN clean room is a new, purpose built, state-of-the-art, 400 square meter clean room with unidirectional, vertical laminar air flow throughout each bay.

Environmental parameters, airborne particulate cleanliness, temperature, relative humidity, air pressure and UV are controlled to specification.

The clean room bays include;-

Lithography & Masking
Etch bay
Deposition & Metrology
Gowning areas
 

View technology

Location:

CRANN, TCD

Case Study

PRTLI 4 funded tools in CRANN Clean Room

 

Equipment Item	Contact Person	Email Address	Case Study
ARIAS GMBH Wet Benches	Tarek Lutz	tarek.lutz@tcd.ie
Brewer Science UK Spin Coater 200 model	Huseyin Kurt	kurth@tcd.ie
DISCO HI-TEC Europe GMBH Automatic Dicing Saw Model DAD3220	Ciaran Fowley	fowleyc@tcd.ie	PDF
NIKON UK LTD LV150 Microscope	Huseyin Kurt	kurth@tcd.ie
HEIDELBERG DWL 66FS Maskless Laser Litho System	Huseyin Kurt	kurth@tcd.ie
Oxford Instruments (UK) Ltd PECVD	Peter Gleeson	peter.gleeson@intel.com
S.P.S. Ltd Mask Aligner and Nanoprint Tool	Laetitia West	laetitia.e.west@intel.com